Parameters influencing the fracture of Mo films and their wider significance

Abstract Fragmentation testing has been used for decades to assess thin film fracture and delamination. Hooke’s law is generally determine a stress from the crack onset strain observed in micrographs or measured as an electrical resistance increase. While this method theory suitable elastic regime, it neglects important characteristics, such residual stress, microstructure, architecture. Thus, there need improve analysis using fragmentation avoid significant errors measuring apparent toughness of films. In-situ X-ray diffraction experiments can measure even individual layers being part multilayer. Which characteristics influence behavior will be demonstrated on Mo films polyimide. Graphical abstract